Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400838 | Temperature-controlled plasma generation system | — | 2025-08-26 |
| 12020906 | Grounding cap module and gas injection device | Shih-Tsung Chen | 2024-06-25 |
| 11551911 | Grounding cap module, gas injection device and etching apparatus | Shih-Tsung Chen | 2023-01-10 |
| 11424107 | Temperature-controlled plasma generation system | — | 2022-08-23 |
| 11139149 | Gas injector | Yan Liu, Ming-Feng Chen, Che-Fu Chen | 2021-10-05 |
| 10818479 | Grounding cap module, gas injection device and etching apparatus | Shih-Tsung Chen | 2020-10-27 |
| 9322400 | Jet pump with centralized nozzle | Lee J. Becker, Charles M. Robeck, Mark R. Dobson, Jason R. Ludwig | 2016-04-26 |