Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6227211 | Uniformity improvement of high aspect ratio contact by stop layer | Wen-Chuan Chiang, James J. Wu | 2001-05-08 |
| 5904570 | Method for polymer removal after etching | Sen-Fu Chen, Wen-Cheng Chang, Heng-Hsin Liu | 1999-05-18 |
| 5763316 | Substrate isolation process to minimize junction leakage | Sen-Fu Chen, Wen-Cheng Chang | 1998-06-09 |
| 5639342 | Method of monitoring and controlling a silicon nitride etch step | Sen-Fu Chen, Wen-Cheng Chang, Heng-Hsin Liu | 1997-06-17 |
| 5633210 | Method for forming damage free patterned layers adjoining the edges of high step height apertures | Sen-Fu Chen, Wen-Cheng Chang, Po-Tau Chu | 1997-05-27 |