Issued Patents All Time
Showing 51–65 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7488560 | Large pellicle | — | 2009-02-10 |
| 6436586 | Pellicle with a filter and method for production thereof | Takashi Matsuoka, Meguru Kashida | 2002-08-20 |
| 5965294 | Hydrogen absorbing alloy electrode | Yoshihiro Kubota, Hiroto Sugahara | 1999-10-12 |
| 5723860 | Frame-supported pellicle for photomask protection | Meguru Kashida | 1998-03-03 |
| 5693382 | Frame-supported pellicle for dustproof protection of photomask in photolithography | Satoshi Kawakami, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1997-12-02 |
| 5691088 | Pellicle for protection of photolithographic mask | Yoshihiro Kubota, Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Kimitaka Kumagae | 1997-11-25 |
| 5616927 | Frame-supported pellicle for dustproof protection of photomask | Yoshihiro Kubota, Satoshi Kawakami, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida | 1997-04-01 |
| 5597669 | Frame-supported pellicle for photolithography | Meguru Kashida, Yoshihiro Kubota | 1997-01-28 |
| 5470621 | Frame-supported pellicle for dustproof protection of photomask | Meguru Kashida, Toru Shirasaki, Yoshihiko Nagata, Sakae Kawaguchi, Yoshihiro Kubota | 1995-11-28 |
| 5419972 | Frame-supported pellicle for dustproof protection of photomask | Sakae Kawaguchi, Toru Shirasaki, Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1995-05-30 |
| 5378514 | Frame-supported pellicle for photolithography | Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1995-01-03 |
| 5370951 | Frame-supported pellicle for protection of photolithographic mask | Yoshihiro Kubota, Meguru Kashida, Hirofumi Kishita, Shinichi Sato, Kouichi Yamaguchi | 1994-12-06 |
| 5368675 | Method for the preparation of a frame-supported pellicle for photolithography | Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1994-11-29 |
| 5327808 | Method for the preparation of a frame-supported pellicle for photolithography | Yoshihiko Nagata, Meguru Kashida, Yoshihiro Kubota | 1994-07-12 |
| 5300348 | Frame-supported pellicle for photolithography, comprising a fluorocarbon containing organopolysiloxane based adhesive | Yoshihiro Kubota, Meguru Kashida, Yoshihiko Nagata, Hitoshi Noguchi, Shinichi Sato +1 more | 1994-04-05 |