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Virtual isolated pattern layer: isolated pattern recognition, extraction and compression |
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| 12019966 |
Virtual isolated pattern layer: isolated pattern recognition, extraction and compression |
James Lewis Nance, Karthikeyan Muthalagu, Nathaniel Garrett Brooks |
2024-06-25 |
| 11630396 |
Model calibration and guided metrology based on smart sampling |
— |
2023-04-18 |
| 10663870 |
Gauge pattern selection |
Thomas I. Wallow, Bart Laenens, Yi-Hsing Peng |
2020-05-26 |
| 10546090 |
Virtual cell model usage |
Gary B Nifong, Karthikeyan Muthalagu, James Lewis Nance, Zhen Ren, Ying Shi |
2020-01-28 |
| 10474781 |
Virtual hierarchical layer usage |
Gary B Nifong, James Lewis Nance, Zhen Ren, Ying Shi |
2019-11-12 |
| 10311190 |
Virtual hierarchical layer patterning |
James Lewis Nance, Gary B Nifong |
2019-06-04 |
| 10303837 |
Virtual cell model geometry compression |
James Lewis Nance, Gary B Nifong |
2019-05-28 |
| 9916411 |
Negative plane usage with a virtual hierarchical layer |
Gary B Nifong, Karthikeyan Muthalagu, James Lewis Nance |
2018-03-13 |
| 9881114 |
Virtual hierarchical layer propagation |
Gary B Nifong, Karthikeyan Muthalagu, James Lewis Nance, Zhen Ren, Ying Shi |
2018-01-30 |
| 9740811 |
Virtual hierarchical layer patterning |
James Lewis Nance, Gary B Nifong |
2017-08-22 |
| 9740812 |
Virtual cell model geometry compression |
James Lewis Nance, Gary B Nifong |
2017-08-22 |
| 9081293 |
System and method for lithography exposure with correction of overlay shift induced by mask heating |
Dong-Hsu Cheng, Chun-Jen Chen, Ming-Ho Tsai, Jim-Hung Liang, Yung-Hsiang Chen |
2015-07-14 |
