Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415899 | Method of determining a focus of a projection system, device manufacturing method, and apparatus for determining a focus of a projection system | Wim Tjibbo Tel | 2022-08-16 |
| 10884333 | Method of designing lithography features by self-assembly of block copolymer | Sander Frederik Wuister, Davide Ambesi | 2021-01-05 |
| 10663870 | Gauge pattern selection | Jun Chen, Thomas I. Wallow, Yi-Hsing Peng | 2020-05-26 |
| 10339260 | Methodology to generate guiding templates for directed self-assembly | Sander Frederik Wuister | 2019-07-02 |