Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12428752 | Silicon carbide epitaxial substrate | Hiroki NISHIHARA, Takaya MIYASE | 2025-09-30 |
| 11984480 | Silicon carbide epitaxial substrate | Taro ENOKIZONO, Tsutomu Hori | 2024-05-14 |
| 11530491 | Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device | Keiji Wada, Tsutomu Hori | 2022-12-20 |
| 11242618 | Silicon carbide substrate and method of manufacturing the same | Shin Harada, Shinsuke Fujiwara | 2022-02-08 |
| 11053607 | Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device | Keiji Wada, Tsutomu Hori | 2021-07-06 |
| 11004941 | Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device | Keiji Wada, Hironori Itoh | 2021-05-11 |
| 10770550 | Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device | Keiji Wada, Hironori Itoh | 2020-09-08 |
| 10741683 | Semiconductor device and method for manufacturing same | Shin Harada, Makoto Sasaki, Kyoko Okita, Keiji Wada, Tomihito Miyazaki | 2020-08-11 |
| 10734222 | Semiconductor stack | Yu Saitoh, Hirofumi Yamamoto | 2020-08-04 |
| 10612160 | Epitaxial wafer and method for manufacturing same | Jun Genba, Hironori Itoh, Tomoaki Hatayama, Hideyuki Doi | 2020-04-07 |
| 10580647 | Semiconductor stack | Yu Saitoh, Hirofumi Yamamoto | 2020-03-03 |
| 10490634 | Silicon carbide epitaxial substrate having a silicon carbide layer and method of manufacturing silicon carbide semiconductor device | Keiji Wada, Hironori Itoh | 2019-11-26 |
| 10395924 | Semiconductor stack | Yu Saitoh, Hirofumi Yamamoto | 2019-08-27 |
| 10396163 | Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device | Keiji Wada, Hironori Itoh, Takemi Terao, Kenji Kanbara | 2019-08-27 |
| 10229836 | Method for manufacturing silicon carbide epitaxial substrate, silicon carbide epitaxial substrate, method for manufacturing silicon carbide semiconductor device, and silicon carbide semiconductor device | Keiji Wada, Toru Hiyoshi | 2019-03-12 |
| 9966249 | Silicon carbide semiconductor substrate and method for manufacturing same | So Tanaka, Kyoko Okita, Ryosuke Kubota, Kenji Kanbara | 2018-05-08 |
| 9957641 | Epitaxial wafer and method for manufacturing same | Jun Genba, Hironori Itoh, Tomoaki Hatayama, Hideyuki Doi | 2018-05-01 |
| 9947782 | Semiconductor device and method for manufacturing same | Shin Harada, Makoto Sasaki, Kyoko Okita, Keiji Wada, Tomihito Miyazaki | 2018-04-17 |
| 9777404 | Method for manufacturing silicon carbide epitaxial substrate, and silicon carbide epitaxial substrate | Keiji Wada, Jun Genba | 2017-10-03 |
| 9728628 | Silicon carbide semiconductor device and method for manufacturing same | Keiji Wada, Toru Hiyoshi, Taku Horii, Kosuke Uchida | 2017-08-08 |
| 9631296 | Method of manufacturing silicon carbide substrate | Shinsuke Fujiwara, Tsutomu Hori, Naoki Ooi, Shunsaku UETA | 2017-04-25 |
| 9583571 | Dislocation in SiC semiconductor substrate | Shin Harada, Shinsuke Fujiwara | 2017-02-28 |
| 9450054 | Dislocation in SiC semiconductor substrate | Shin Harada, Shinsuke Fujiwara | 2016-09-20 |
| 9255344 | Silicon carbide substrate and method of manufacturing the same | Shin Harada, Shinsuke Fujiwara | 2016-02-09 |
| 9090992 | Method of manufacturing single crystal | Makoto Sasaki, Shin Harada | 2015-07-28 |