Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7045045 | Workpiece holder for processing apparatus, and processing apparatus using the same | Hirohiko Nakata, Akira Kuibira | 2006-05-16 |
| 6946625 | Ceramic susceptor | Akira Kuibira, Hirohiko Nakata | 2005-09-20 |
| 6881128 | Ceramics base plate and method for producing the same | Hirohiko Nakata | 2005-04-19 |
| 6806443 | Ceramic susceptor | Akira Kuibira, Hirohiko Nakata | 2004-10-19 |
| 6770379 | Susceptor for semiconductor manufacturing equipment and process for producing the same | Yasuhisa Yushio, Hirohiko Nakata | 2004-08-03 |
| 6716304 | Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder | Akira Kuibira, Hirohiko Nakata, Kenjiro Higaki, Takashi Ishii, Yasuyuki Matsui | 2004-04-06 |
| 6696103 | Aluminium nitride ceramics and method for preparing the same | Kouhei Shimoda, Kazuya Kamitake, Hirohiko Nakata, Kazutaka Sasaki, Harutoshi Ukegawa | 2004-02-24 |
| 6671489 | Thermal fixing apparatus | Hirohiko Nakata | 2003-12-30 |
| 6664515 | Circuit pattern of resistance heating elements and substrate-treating apparatus incorporating the pattern | Masashi Narita, Hirohiko Nakata, Akira Kuibira | 2003-12-16 |
| 6653604 | Heater member for mounting heating object and substrate processing apparatus using the same | Hirohiko Nakata, Akira Kuibira, Kenji Shinma | 2003-11-25 |
| 6548787 | Ceramic heater | Hirohiko Nakata, Syunji Nagao | 2003-04-15 |
| 6508884 | Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus | Akira Kuibira, Hirohiko Nakata, Kenjiro Higaki, Takashi Ishii, Yasuyuki Matsui | 2003-01-21 |
| 6500052 | Method of polishing a ceramic substrate | Hirohiko Nakata, Motoyuki Tanaka, Yasuhisa Yushio | 2002-12-31 |
| 6458444 | Ceramic substrate and polishing method thereof | Hirohiko Nakata, Motoyuki Tanaka, Yasuhisa Yushio | 2002-10-01 |
| 6428741 | Aluminum nitride sintered body and method of preparing the same | Yasuhisa Yushio, Hirohiko Nakata, Kazutaka Sasaki, Motoyuki Tanaka, Yasuhiro Murase | 2002-08-06 |
| 6423400 | Susceptor for semiconductor manufacturing equipment and process for producing the same | Yasuhisa Yushio, Hirohiko Nakata | 2002-07-23 |
| 6392197 | Ceramic heater for toner-fixing units and method for manufacturing the heater | Hirohiko Nakata | 2002-05-21 |
| 6384378 | Ceramic heater for toner-fixing units and method for manufacturing the heater | Hirohiko Nakata | 2002-05-07 |
| 6294275 | Aluminum-nitride sintered body, method for fabricating the same, and semiconductor substrate comprising the same | Hirohiko Nakata, Yasuhisa Yushio, Motoyuki Tanaka, Shunji Nagao, Akira Shinkoda +1 more | 2001-09-25 |
| 6271163 | Aluminum nitride sintered body and method of preparing the same | Yasuhisa Yushio, Hirohiko Nakata, Kazutaka Sasaki, Motoyuki Tanaka, Yasuhiro Murase | 2001-08-07 |
| 6174614 | Sintered aluminum nitride body and metallized substrate prepared therefrom | Yasuhisa Yushio, Hirohiko Nakata, Kazutaka Sasaki, Motoyuki Tanaka | 2001-01-16 |
| 6084221 | Aluminum nitride heater | Hirohiko Nakata, Yasuhisa Yushio | 2000-07-04 |
| 6078027 | Ceramic fixing heater containing silicon nitride | Hirohiko Nakata, Yasuhisa Yushio | 2000-06-20 |
| 6049064 | Heat fixing device for fixing a toner image | Hirohiko Nakata | 2000-04-11 |
| 5955148 | Aluminium nitride ceramics and method for preparing the same | Kouhei Shimoda, Kazuya Kamitake, Hirohiko Nakata, Kazutaka Sasaki, Harutoshi Ukegawa | 1999-09-21 |