Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6171192 | Flywheel assembly employing a damper mechanism having an annular chamber filled with a dry lubricant | Hirotaka Fukushima | 2001-01-09 |
| 5783342 | Method and system for measurement of resist pattern | Masahiro Muro | 1998-07-21 |
| 5780206 | Fine pattern forming process using a resist composition sensitive to deep ultraviolet light | Fumiyoshi Urano, Takanori Yasuda, Akiko Katsuyama | 1998-07-14 |
| 5741628 | Method of forming micropatterns by having a resist film absorb water | Takahiro Matsuo, Masayuki Endo, Masaru Sasago | 1998-04-21 |
| 5695910 | Resist composition for deep ultraviolet light | Fumiyoshi Urano, Takanori Yasuda, Akiko Katsuyama | 1997-12-09 |
| 5679500 | Method of forming micropatterns utilizing silylation and overall energy beam exposure | Takahiro Matsuo, Masayuki Endo, Masaru Sasago | 1997-10-21 |
| 5658711 | Method of forming micropatterns | Takahiro Matsuo, Masayuki Endo, Masaru Sasago | 1997-08-19 |
| 5590137 | Semiconductor IC tester | — | 1996-12-31 |
| 5518579 | Method for forming a fine pattern | Akiko Katsuyama, Masaru Sasago | 1996-05-21 |
| 5465066 | Waveform formatter | Toshiyuki Negishi, Masatoshi Sato, Hiroshi Tsukahara | 1995-11-07 |
| 5252414 | Evaluation method of resist coating | Hironao Iwai, Noboru Nomura | 1993-10-12 |
| 5191465 | Optical apparatus for alignment of reticle and wafer in exposure apparatus | Noboru Nomura | 1993-03-02 |
| 5186788 | Fine pattern forming method | Kazuhiko Hashimoto, Noboru Nomura | 1993-02-16 |
| 4870289 | Apparatus for controlling relation in position between a photomask and a wafer | Takeo Sato, Shinichiro Aoki, Katsumasa Yamaguchi, Tadashi Kaneko, Noboru Nomura +1 more | 1989-09-26 |
| 4828392 | Exposure apparatus | Noboru Nomura, Takayoshi Matsumura, Midori Yamaguchi | 1989-05-09 |
| 4771180 | Exposure apparatus including an optical system for aligning a reticle and a wafer | Noboru Nomura | 1988-09-13 |
| 4764206 | Contradeglutitious solid herbicidal composition | Mamoru Yoshida | 1988-08-16 |