Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6752625 | Method and apparatus device for the heat treatment of substrates | Patrick Schmid, Dieter Zernickel | 2004-06-22 |
| 6449428 | Gas driven rotating susceptor for rapid thermal processing (RTP) system | Andreas Hauke, Karsten Weber, Dieter Zernickel | 2002-09-10 |
| 6005226 | Rapid thermal processing (RTP) system with gas driven rotating substrate | Andreas Hauke, Ulrich Walk, Dieter Zernickel | 1999-12-21 |
| 5870526 | Inflatable elastomeric element for rapid thermal processing (RTP) system | Helmut Merkle, Ulrich Walk, Dieter Zernickel | 1999-02-09 |