Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449428 | Gas driven rotating susceptor for rapid thermal processing (RTP) system | Helmut Aschner, Karsten Weber, Dieter Zernickel | 2002-09-10 |
| 6005226 | Rapid thermal processing (RTP) system with gas driven rotating substrate | Helmut Aschner, Ulrich Walk, Dieter Zernickel | 1999-12-21 |