Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10024719 | Measurement object, method for the production thereof and device for the thermal treatment of substrates | Steffen Mueller | 2018-07-17 |
| 7037797 | Localized heating and cooling of substrates | Sohaila Shooshtarian, Narasimha Acharya, Mike Elbert, Andreas Tillmann | 2006-05-02 |
| 6752625 | Method and apparatus device for the heat treatment of substrates | Helmut Aschner, Patrick Schmid | 2004-06-22 |
| 6449428 | Gas driven rotating susceptor for rapid thermal processing (RTP) system | Helmut Aschner, Andreas Hauke, Karsten Weber | 2002-09-10 |
| 6005226 | Rapid thermal processing (RTP) system with gas driven rotating substrate | Helmut Aschner, Andreas Hauke, Ulrich Walk | 1999-12-21 |
| 5870526 | Inflatable elastomeric element for rapid thermal processing (RTP) system | Helmut Aschner, Helmut Merkle, Ulrich Walk | 1999-02-09 |