Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6005226 | Rapid thermal processing (RTP) system with gas driven rotating substrate | Helmut Aschner, Andreas Hauke, Dieter Zernickel | 1999-12-21 |
| 5870526 | Inflatable elastomeric element for rapid thermal processing (RTP) system | Helmut Aschner, Helmut Merkle, Dieter Zernickel | 1999-02-09 |