Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6955178 | Substrate treatment apparatus | Masaki Kuzumoto, Seiji Noda, Izumi Oya, Makoto Miyamoto, Hideo Horibe +1 more | 2005-10-18 |
| 6616773 | Substrate treatment method | Masaki Kuzumoto, Seiji Noda, Izumi Oya, Makoto Miyamoto, Hideo Horibe +1 more | 2003-09-09 |
| 6616774 | Wafer cleaning device and tray for use in wafer cleaning device | Haruki Sonoda, Kazuto Nishizaki, Masatoshi Hirokawa, Ei-Ichi Ando, Yusuke Abe +1 more | 2003-09-09 |
| 6432218 | Multi-step flow cleaning method and multi-step flow cleaning apparatus | Masatoshi Hirokawa, Haruki Sonoda, Yusuke Abe, Masashi Omori, Hiroshi Tanaka | 2002-08-13 |