Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616774 | Wafer cleaning device and tray for use in wafer cleaning device | Haruki Sonoda, Kazuto Nishizaki, Tetsuji Oishi, Masatoshi Hirokawa, Ei-Ichi Ando +1 more | 2003-09-09 |
| 6432218 | Multi-step flow cleaning method and multi-step flow cleaning apparatus | Masatoshi Hirokawa, Haruki Sonoda, Yusuke Abe, Tetsuji Oishi, Hiroshi Tanaka | 2002-08-13 |
| 5709037 | Stream drying process | Hiroshi Tanaka, Nobuaki Doi, Hiroaki Ishikawa | 1998-01-20 |
| 5608974 | Steam drying apparatus, cleaning apparatus incorporating the same, and steam drying process | Hiroshi Tanaka, Nobuaki Doi, Hiroaki Ishikawa | 1997-03-11 |