Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616774 | Wafer cleaning device and tray for use in wafer cleaning device | Kazuto Nishizaki, Tetsuji Oishi, Masatoshi Hirokawa, Ei-Ichi Ando, Yusuke Abe +1 more | 2003-09-09 |
| 6432218 | Multi-step flow cleaning method and multi-step flow cleaning apparatus | Masatoshi Hirokawa, Yusuke Abe, Tetsuji Oishi, Masashi Omori, Hiroshi Tanaka | 2002-08-13 |