| 8693099 |
Antireflection film |
Toshitaka Kawashima, Shigeo Kubota, Naoya Eguchi, Junichi Ohsako |
2014-04-08 |
| 8518756 |
Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device |
Nobuhiko Umezu, Koichi Tsukihara, Goh Matsunobu, Yoshio Inagaki, Shin Hotta +1 more |
2013-08-27 |
| 8168518 |
Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device |
Nobuhiko Umezu, Koichi Tsukihara, Goh Matsunobu, Yoshio Inagaki, Shin Hotta +1 more |
2012-05-01 |
| 7820531 |
Method of manufacturing semiconductor device, method of manufacturing display apparatus, apparatus of manufacturing semiconductor device, and display apparatus |
Goh Matsunobu, Yoshio Inagaki, Nobuhiko Umezu, Koichi Tsukihara |
2010-10-26 |
| 7154673 |
Light irradiator |
Koichi Tsukihara |
2006-12-26 |
| 7109435 |
Beam irradiator and laser anneal device |
Koichi Tsukihara |
2006-09-19 |
| 6933185 |
Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor |
Hiroyuki Wada, Yoshimi Hirata, Ayumu Taguchi, Nobuhiko Umezu, Shigeo Kubota +5 more |
2005-08-23 |
| 6798498 |
Apparatus for evaluating polysilicon film |
Hiroyuki Wada, Nobuhiko Umezu, Eiji Isomura, Tetsuo Abe, Tadashi Hattori +7 more |
2004-09-28 |
| 6780692 |
Laser annealing apparatus and method of fabricating thin film transistor |
Koichi Tsukihara, Naoya Eguchi |
2004-08-24 |
| 6673639 |
Method and system for evaluating polysilicon, and method and system for fabricating thin film transistor |
Hiroyuki Wada, Nobuhiko Umezu |
2004-01-06 |
| 6494584 |
Ultraviolet optical device having an optical part with a gas sprayed thereon |
Hiroyuki Wada, Michio Oka |
2002-12-17 |
| 6248167 |
Method for single crystal growth and growth apparatus |
Tsutomu Okamoto, Shigeo Kubota |
2001-06-19 |
| 6240111 |
Laser beam generating apparatus and method |
Shigeo Kubota, Nobuhiko Umezu, Tatsuo Fukui, Hisashi Masuda |
2001-05-29 |
| 6146251 |
Polishing method, method of manufacturing an optical device, and a liquid suspension used for polishing |
Tatsuo Fukui |
2000-11-14 |
| 5862163 |
Apparatus for generating ultraviolet laser radiation |
Nobuhiko Umezu, Hiroyuki Wada |
1999-01-19 |
| 5370076 |
Method of producing single crystal of KTiOPO.sub.4 |
Tsutomu Okamoto, Koji Watanabe, Tatsuo Fukui, Yasushi Minoya, Shigeo Kubota |
1994-12-06 |
| 5322588 |
Method for producing KTIOPO4 single crystal |
Kazutaka Habu, Tsutomu Okamoto, Koichi Aso |
1994-06-21 |
| 4935902 |
Sequential access memory |
— |
1990-06-19 |
