Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8693099 | Antireflection film | Toshitaka Kawashima, Shigeo Kubota, Naoya Eguchi, Junichi Ohsako | 2014-04-08 |
| 8518756 | Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device | Nobuhiko Umezu, Koichi Tsukihara, Goh Matsunobu, Yoshio Inagaki, Shin Hotta +1 more | 2013-08-27 |
| 8168518 | Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device | Nobuhiko Umezu, Koichi Tsukihara, Goh Matsunobu, Yoshio Inagaki, Shin Hotta +1 more | 2012-05-01 |
| 7820531 | Method of manufacturing semiconductor device, method of manufacturing display apparatus, apparatus of manufacturing semiconductor device, and display apparatus | Goh Matsunobu, Yoshio Inagaki, Nobuhiko Umezu, Koichi Tsukihara | 2010-10-26 |
| 7154673 | Light irradiator | Koichi Tsukihara | 2006-12-26 |
| 7109435 | Beam irradiator and laser anneal device | Koichi Tsukihara | 2006-09-19 |
| 6933185 | Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor | Hiroyuki Wada, Yoshimi Hirata, Ayumu Taguchi, Nobuhiko Umezu, Shigeo Kubota +5 more | 2005-08-23 |
| 6798498 | Apparatus for evaluating polysilicon film | Hiroyuki Wada, Nobuhiko Umezu, Eiji Isomura, Tetsuo Abe, Tadashi Hattori +7 more | 2004-09-28 |
| 6780692 | Laser annealing apparatus and method of fabricating thin film transistor | Koichi Tsukihara, Naoya Eguchi | 2004-08-24 |
| 6673639 | Method and system for evaluating polysilicon, and method and system for fabricating thin film transistor | Hiroyuki Wada, Nobuhiko Umezu | 2004-01-06 |
| 6494584 | Ultraviolet optical device having an optical part with a gas sprayed thereon | Hiroyuki Wada, Michio Oka | 2002-12-17 |
| 6248167 | Method for single crystal growth and growth apparatus | Tsutomu Okamoto, Shigeo Kubota | 2001-06-19 |
| 6240111 | Laser beam generating apparatus and method | Shigeo Kubota, Nobuhiko Umezu, Tatsuo Fukui, Hisashi Masuda | 2001-05-29 |
| 6146251 | Polishing method, method of manufacturing an optical device, and a liquid suspension used for polishing | Tatsuo Fukui | 2000-11-14 |
| 5862163 | Apparatus for generating ultraviolet laser radiation | Nobuhiko Umezu, Hiroyuki Wada | 1999-01-19 |
| 5370076 | Method of producing single crystal of KTiOPO.sub.4 | Tsutomu Okamoto, Koji Watanabe, Tatsuo Fukui, Yasushi Minoya, Shigeo Kubota | 1994-12-06 |
| 5322588 | Method for producing KTIOPO4 single crystal | Kazutaka Habu, Tsutomu Okamoto, Koichi Aso | 1994-06-21 |
| 4935902 | Sequential access memory | — | 1990-06-19 |