Issued Patents All Time
Showing 25 most recent of 216 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11840011 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2023-12-12 |
| 11718014 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2023-08-08 |
| 11567402 | Imprint apparatus, imprint method, and method of manufacturing article | — | 2023-01-31 |
| 11531266 | Imprinting method, imprint apparatus, and article manufacturing method | Akio Aoki | 2022-12-20 |
| 10871709 | Imprint apparatus and method of manufacturing article | Katsutoshi Sakai | 2020-12-22 |
| 10617046 | Electromagnetic wave absorbing body and method for manufacturing electromagnetic wave absorbing body | Akihiko Saito, Yu Nakama, Mikiko Tsutsui | 2020-04-07 |
| 10421219 | Imprint apparatus and method of manufacturing article | — | 2019-09-24 |
| 9810979 | Imprint apparatus and article manufacturing method | — | 2017-11-07 |
| 8120750 | Exposure apparatus and method of manufacturing device | — | 2012-02-21 |
| 7884918 | Exposure apparatus and method of manufacturing device | — | 2011-02-08 |
| 7499180 | Alignment stage, exposure apparatus, and semiconductor device manufacturing method | — | 2009-03-03 |
| 7341694 | Ammonia sensor | Hiroyuki Nishiyama, Shiro Kakimoto, Ryuji Inoue, Hitoshi Yokoi, Noboru Ishida +4 more | 2008-03-11 |
| 7337679 | Rotation sensor | Masashi Sugimoto | 2008-03-04 |
| 7190160 | Rotation sensor | — | 2007-03-13 |
| 7042576 | Positioning stage device | — | 2006-05-09 |
| 6988321 | Electrostatic capacitance tilt angle sensor | Hiroshi Ueno | 2006-01-24 |
| 6953939 | Testing apparatus using scanning electron microscope | Tetsuo Abe, Kouki Okawauchi, Hironori Fujita, Minoru Takeda, Yuichi Aki +4 more | 2005-10-11 |
| 6933185 | Polysilicon evaluating method, polysilicon inspection apparatus and method for preparation of thin film transistor | Hiroyuki Wada, Yoshimi Hirata, Ayumu Taguchi, Koichi Tatsuki, Nobuhiko Umezu +5 more | 2005-08-23 |
| 6798498 | Apparatus for evaluating polysilicon film | Hiroyuki Wada, Koichi Tatsuki, Nobuhiko Umezu, Eiji Isomura, Tetsuo Abe +7 more | 2004-09-28 |
| 6337672 | Combined display panel | Kazuhiro Inoguchi, Kunitomo Aoki, Nobuei Ito | 2002-01-08 |
| 6314229 | End seal structure for cable closure | Daijiro Sasaki, Toshiaki Uehara | 2001-11-06 |
| 6262531 | Thin-film El display panel having uniform display characteristics | Kazuhiro Inoguchi, Nobuei Ito, Yutaka Hattori, Masahiko Osada | 2001-07-17 |
| 6254740 | Sputtering method of producing and electroluminescent device with improved blue color purity | Akira Kato, Masayuki Katayama, Nobuei Ito | 2001-07-03 |
| 6224222 | Combined display panel | Kazuhiro Inoguchi, Nobuei Ito | 2001-05-01 |
| 6226434 | Closure for cable connection | Koji Koshiyama, Yasunari Tsuruta, Tetsuo Nozawa, Yasuhiro Tamaki, Hiroshi Yokosuka | 2001-05-01 |