Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953939 | Testing apparatus using scanning electron microscope | Tetsuo Abe, Tadashi Hattori, Hironori Fujita, Minoru Takeda, Yuichi Aki +4 more | 2005-10-11 |
| 6524871 | Defect inspection apparatus and defect inspection method | — | 2003-02-25 |
| 6337488 | Defect inspection apparatus and defect inspection method | — | 2002-01-08 |