Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6798498 | Apparatus for evaluating polysilicon film | Hiroyuki Wada, Koichi Tatsuki, Nobuhiko Umezu, Tetsuo Abe, Tadashi Hattori +7 more | 2004-09-28 |
| 6094263 | Visual examination apparatus and visual examination method of semiconductor device | Hiroshi Tomiya | 2000-07-25 |