| 11112345 |
Microparticle measurement device and cleaning method for microparticle measurement device |
Yoshitsugu Sakai, Masaaki Abe, Shoji Akiyama, Shinichi Hasegawa |
2021-09-07 |
| 8592713 |
Irradiating apparatus, semiconductor device manufacturing apparatus, semiconductor device manufacturing method, and display device manufacturing method |
— |
2013-11-26 |
| 8518756 |
Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device |
Nobuhiko Umezu, Goh Matsunobu, Yoshio Inagaki, Koichi Tatsuki, Shin Hotta +1 more |
2013-08-27 |
| 8451536 |
Irradiation apparatus and manufacturing method for semiconductor device |
— |
2013-05-28 |
| 8226256 |
Display unit |
Tetsuo Urabe, Yuichi Iwase, Yoichi Tomo, Toshihiro Fukuda |
2012-07-24 |
| 8193008 |
Method of forming semiconductor thin film and semiconductor thin film inspection apparatus |
Nobuhiko Umezu, Hirohisa Amago, Go MATSUNOBU, Katsuya Shirai |
2012-06-05 |
| 8168518 |
Method for crystallizing thin film, method for manufacturing thin film semiconductor device, method for manufacturing electronic apparatus, and method for manufacturing display device |
Nobuhiko Umezu, Goh Matsunobu, Yoshio Inagaki, Koichi Tatsuki, Shin Hotta +1 more |
2012-05-01 |
| 7820531 |
Method of manufacturing semiconductor device, method of manufacturing display apparatus, apparatus of manufacturing semiconductor device, and display apparatus |
Goh Matsunobu, Koichi Tatsuki, Yoshio Inagaki, Nobuhiko Umezu |
2010-10-26 |
| 7154673 |
Light irradiator |
Koichi Tatsuki |
2006-12-26 |
| 7109435 |
Beam irradiator and laser anneal device |
Koichi Tatsuki |
2006-09-19 |
| 6780692 |
Laser annealing apparatus and method of fabricating thin film transistor |
Koichi Tatsuki, Naoya Eguchi |
2004-08-24 |