Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648888 | Apparatus and method for splitting substrates | Thierry Barge, Walter Schwarzenbach, Thuan Truong, Bruno Ghyselen | 2010-01-19 |
| 7601606 | Method for reducing the trap density in a semiconductor wafer | Francois Brunier, Vivien Renauld | 2009-10-13 |
| 7466907 | Annealing process and device of semiconductor wafer | Walter Schwarzenbach | 2008-12-16 |
| 7098148 | Method for heat treating a semiconductor wafer | Walter Schwarzenbach | 2006-08-29 |
| 7094668 | Annealing process and device of semiconductor wafer | Walter Schwarzenbach | 2006-08-22 |
| 7017570 | Apparatus and method for splitting substrates | Thierry Barge, Walter Schwarzenbach, Thuan Truong, Bruno Ghyselen | 2006-03-28 |
| 6770144 | Multideposition SACVD reactor | Patrick Raffin, Fabrice Delarue, Christophe Balsan, Joel Journe | 2004-08-03 |