Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7714992 | Equipment and method for monitoring an immersion lithography device | Jean-Louis Stehle | 2010-05-11 |
| 7230701 | Compact spectroscopic ellipsometer | Jean-Louis Stehle, Pierre Boher, Luc Tantart, Jean-Pierre Rey | 2007-06-12 |
| 5991037 | High spatial resolution ellipsometry device | Jean-Louis Stehle, Dorian Zahorski | 1999-11-23 |