Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12421600 | 2-in-1 (UV-assisted and plasma enhanced) ALD and ALE chamber | Jung-Hua Chang, CHING-LIANG YI | 2025-09-23 |
| 12403685 | Plate cooling device and de-bonding station with plate cooling device | Jung-Hua Chang | 2025-09-02 |
| 12224159 | Gas mixing method to enhance plasma | Chi Hung Cheng, Yao-Syuan Cheng, Kuo-Ju Liu, CHING-LIANG YI | 2025-02-11 |
| 11846022 | Thin-film-deposition machine | Jing-Cheng Lin | 2023-12-19 |
| 11739423 | Atomic layer deposition apparatus for coating on fine powders | Jing-Cheng Lin, Jung-Hua Chang, Chia-Cheng Ku | 2023-08-29 |
| 11476100 | Shielding mechanism and substrate-processing chamber with the same | Jing-Cheng Lin, Yu-Te Shen, Chi Hung Cheng | 2022-10-18 |
| 11427910 | Atomic layer deposition equipment capable of reducing precursor deposition and atomic layer deposition process method using the same | Jing-Cheng Lin | 2022-08-30 |
| 11332826 | Atomic layer deposition equipment and process method | Jing-Cheng Lin | 2022-05-17 |