Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8802335 | Extreme ultra violet (EUV) mask | Yoon-suk Hyun | 2014-08-12 |
| 8163445 | Extreme ultraviolet mask and method for fabricating the same | — | 2012-04-24 |
| 8158305 | Photomask for extreme ultraviolet lithography and method for fabricating the same | — | 2012-04-17 |
| 8021805 | Backside phase grating mask and method for manufacturing the same | Byung Ho Nam | 2011-09-20 |
| 7977016 | Method for fabricating extreme ultraviolet lithography mask | Yong Kyoo Choi | 2011-07-12 |
| 7803505 | Method of fabricating a mask for a semiconductor device | — | 2010-09-28 |
| 7764368 | Method and apparatus for inspecting defects on mask | Yong Kyoo Choi, Byung Sup Cho | 2010-07-27 |