Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7764368 | Method and apparatus for inspecting defects on mask | Sung Hyun Oh, Yong Kyoo Choi | 2010-07-27 |
| 5975108 | Automatic drain collecting and exhausting apparatus for semiconductor fabrication system | — | 1999-11-02 |