Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977016 | Method for fabricating extreme ultraviolet lithography mask | Sung Hyun Oh | 2011-07-12 |
| 7764368 | Method and apparatus for inspecting defects on mask | Sung Hyun Oh, Byung Sup Cho | 2010-07-27 |
| 6242164 | Method for patterning chemical amplified photoresist | Byeong Chan Kim | 2001-06-05 |
| 6214498 | Lithography mask and a fabricating method thereof | — | 2001-04-10 |
| 6168907 | Method for etching semiconductor device | Byeong Chan Kim | 2001-01-02 |
| 6080514 | Fabrication method of mask for semiconductor device | — | 2000-06-27 |
| 5891596 | Method for fabricating phase shifting mask | — | 1999-04-06 |
| 5824438 | Structure of phase shifting mask and method of manufacturing the same comprising an adhesive layer between a phase shift layer and a light blocking layer | Chan Min Park, Jun Seok Lee | 1998-10-20 |
| 5770336 | Lithography mask and fabrication method thereof | — | 1998-06-23 |
| 5658695 | Method for fabricating phase shift mask comprising the use of a second photoshield layer as a sidewall | — | 1997-08-19 |
| 5650347 | Method of manufacturing a lightly doped drain MOS transistor | — | 1997-07-22 |
| 5591550 | Phase shift mask and method for forming phase shift mask | Young Jin SONG | 1997-01-07 |