Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6242164 | Method for patterning chemical amplified photoresist | Yong Kyoo Choi | 2001-06-05 |
| 6168907 | Method for etching semiconductor device | Yong Kyoo Choi | 2001-01-02 |
| 5882824 | Phase-shifting mask and method for manufacturing the same | — | 1999-03-16 |
| 5840167 | Sputtering deposition apparatus and method utilizing charged particles | — | 1998-11-24 |