Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841668 | Photomasks for reducing thermal stress generated by heat | — | 2017-12-12 |
| 9664996 | Photomasks for reducing thermal stress generated by heat | — | 2017-05-30 |
| 9599887 | Photo mask including pre-alignment keys and photolithography apparatus performing a pre-alignment process for the photo mask | — | 2017-03-21 |
| 9335625 | Blank masks for extreme ultra violet lithography, methods of fabricating the same, and methods of correcting registration errors thereof | Young Mo Lee | 2016-05-10 |
| 9274411 | Reflection type blank masks, methods of fabricating the same, and methods of fabricating reflection type photo masks using the same | Yong Dae Kim | 2016-03-01 |
| 8906582 | Blank masks for extreme ultra violet lithography, methods of fabricating the same, and methods of correcting registration errors thereof | Young Mo Lee | 2014-12-09 |
| 8748065 | Reflection type blank masks, methods of fabricating the same, and methods of fabricating reflection type photo masks using the same | Yong Dae Kim | 2014-06-10 |
| 8486822 | Semiconductor device having dummy pattern and the method for fabricating the same | — | 2013-07-16 |
| 8021805 | Backside phase grating mask and method for manufacturing the same | Sung Hyun Oh | 2011-09-20 |
| 7902671 | Semiconductor device having dummy pattern and the method for fabricating the same | — | 2011-03-08 |
| 7422830 | Method for detecting failure of database patterns of photo mask | Byoung Sub Nam | 2008-09-09 |
| 5859439 | Apparatus for aligning semiconductor wafer using mixed light with different wavelengths | Jae-Keun Jeong | 1999-01-12 |
| 5825469 | Auto focus system using twice reflection | Jae-Keun Jeong | 1998-10-20 |