Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11982015 | Method for depositing an epitaxial layer on a front side of a semiconductor wafer, and device for carrying out the method | Joerg Haberecht, Stephan Heinrich, Rene Stein | 2024-05-14 |
| 11578424 | Epitaxially coated semiconductor wafer of monocrystalline silicon and method for production thereof | Joerg Haberecht | 2023-02-14 |
| 11380621 | Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer | Christian Hager | 2022-07-05 |
| 10991614 | Susceptor for holding a semiconductor wafer with an orientation notch during the deposition of a layer on a front side of the semiconductor wafer and method for depositing the layer by using the susceptor | — | 2021-04-27 |
| 10597795 | Method for producing a semiconductor wafer with epitaxial layer in a deposition chamber, apparatus for producing a semiconductor wafer with epitaxial layer, and semiconductor wafer with epitaxial layer | Patrick Moos | 2020-03-24 |
| 9991208 | Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer | Christian Hager | 2018-06-05 |
| 9240316 | Method for producing an epitaxially coated semiconductor wafer | Christian Hager | 2016-01-19 |
| 8304860 | Epitaxially coated silicon wafer and method for producing an epitaxially coated silicon wafer | Friedrich Passek, Frank Laube, Martin Pickel | 2012-11-06 |
| 7935614 | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | Norbert Werner | 2011-05-03 |
| 7922813 | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | Christian Hager | 2011-04-12 |
| 7838398 | Epitaxially coated semiconductor wafer and device and method for producing an epitaxially coated semiconductor wafer | Norbert Werner | 2010-11-23 |
| 7659207 | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafer | Thorsten Schneppensieper | 2010-02-09 |
| 7579261 | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | Norbert Werner | 2009-08-25 |
| 7285483 | Coated semiconductor wafer, and process and apparatus for producing the semiconductor wafer | Norbert Werner | 2007-10-23 |
| 7101794 | Coated semiconductor wafer, and process and device for producing the semiconductor wafer | Norbert Werner | 2006-09-05 |
| 6630024 | Method for the production of an epitaxially grown semiconductor wafer | Rudiger Schmolke, Günther Obermeier, Dieter Graf, Peter Storck, Klaus Messmann +1 more | 2003-10-07 |
| 6306735 | Method for producing a semiconductor wafer | — | 2001-10-23 |
| 5355831 | Epitaxially coated semiconductor wafers having low-oxygen zone of adjustable extent and process for producing same | — | 1994-10-18 |