Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11982015 | Method for depositing an epitaxial layer on a front side of a semiconductor wafer, and device for carrying out the method | Joerg Haberecht, Stephan Heinrich, Reinhard Schauer | 2024-05-14 |
| 11538683 | Method for depositing an epitaxial layer on a front side of a semiconductor wafer and device for carrying out the method | Joerg Haberecht, Stephan Heinrich | 2022-12-27 |
| 6773505 | Method for the sublimation growth of an SiC single crystal, involving heating under growth pressure | Harald Kuhn, Johannes Voelkl | 2004-08-10 |
| 6770136 | Device having a foil-lined crucible for the sublimation growth of an SiC single crystal | Harald Kuhn, Johannes Voelkl | 2004-08-03 |
| 6723166 | Seed crystal holder with lateral mount for an SiC seed crystal | Harald Kuhn, Johannes Voelkl, Wolfgang Zintl | 2004-04-20 |
| 6689212 | Method for growing an &agr;-SiC bulk single crystal | Harald Kuhn, Johannes Volkl | 2004-02-10 |
| 6497764 | Method for growing SiC single crystals | Harald Kuhn, Johannes Volkl | 2002-12-24 |
| 6344085 | Device and method for producing at least one SiC single crystal | Harald Kuhn, Roland Rupp, Johannes Volkl | 2002-02-05 |
| 5985026 | Seed crystal for producing monocrystals and method for producing SiC monocrystals or monocrystalline SiC layers | Johannes Volkl | 1999-11-16 |
| 5968265 | Method for producing silicon carbide monocrystals | Roland Rupp, Johannes Volkl | 1999-10-19 |
| 5964943 | Method of producing boron-doped monocrystalline silicon carbide | Roland Rupp | 1999-10-12 |
| 5382822 | Metal-insulator semiconductor field-effect transistor | — | 1995-01-17 |
| 5227034 | Method for electrolytic etching of silicon carbide | Georg Wittmann | 1993-07-13 |
| 5211801 | Method for manufacturing single-crystal silicon carbide | — | 1993-05-18 |