Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11982015 | Method for depositing an epitaxial layer on a front side of a semiconductor wafer, and device for carrying out the method | Stephan Heinrich, Reinhard Schauer, Rene Stein | 2024-05-14 |
| 11578424 | Epitaxially coated semiconductor wafer of monocrystalline silicon and method for production thereof | Reinhard Schauer | 2023-02-14 |
| 11538683 | Method for depositing an epitaxial layer on a front side of a semiconductor wafer and device for carrying out the method | Rene Stein, Stephan Heinrich | 2022-12-27 |
| 10982324 | Method and device for producing coated semiconductor wafers | — | 2021-04-20 |
| 10865499 | Susceptor for holding a semiconductor wafer, method for depositing an epitaxial layer on a front side of a semiconductor wafer, and semiconductor wafer with epitaxial layer | — | 2020-12-15 |
| 8709156 | Methods for producing epitaxially coated silicon wafers | — | 2014-04-29 |
| 8372298 | Method for producing epitaxially coated silicon wafers | — | 2013-02-12 |
| 8268708 | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | Christian Hager, Georg Brenninger | 2012-09-18 |