Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10240235 | Method and apparatus for depositing a material layer originating from process gas on a substrate wafer | Alois Aigner, Christian Hager | 2019-03-26 |
| 9828692 | Apparatus and process for producing a single crystal of silicon | Waldemar Stein, Maik Haeberlen | 2017-11-28 |
| 9828693 | Apparatus and process for producing a crystal of semiconductor material | Georg Raming | 2017-11-28 |
| 9410262 | Method for producing a silicon single crystal | Josef Lobmeyer, Waldemar Stein | 2016-08-09 |
| 9153472 | Device for depositing a layer on a semiconductor wafer by means of vapour deposition | — | 2015-10-06 |
| 9018021 | Method and apparatus for depositing a layer on a semiconductor wafer by vapor deposition in a process chamber | — | 2015-04-28 |
| 8357549 | Method for identifying an incorrect position of a semiconductor wafer during a thermal treatment | Konrad Gruendl | 2013-01-22 |
| 8283262 | Method for depositing a layer on a semiconductor wafer by means of CVD and chamber for carrying out the method | Alois Aigner | 2012-10-09 |
| 8268708 | Epitaxially coated silicon wafer and method for producing epitaxially coated silicon wafers | Joerg Haberecht, Christian Hager | 2012-09-18 |
| 6869481 | Method and device for regulating the differential pressure in epitaxy reactors | Anton Schatzeder | 2005-03-22 |
| 6435797 | Method and device for loading a susceptor | Herbert Mittermaier, Alois Aigner | 2002-08-20 |
| 6217212 | Method and device for detecting an incorrect position of a semiconductor wafer | Wolfgang SEDLMEIER, Martin Fürfanger, Per-Ove Hansson | 2001-04-17 |