Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10240235 | Method and apparatus for depositing a material layer originating from process gas on a substrate wafer | Georg Brenninger, Christian Hager | 2019-03-26 |
| 8283262 | Method for depositing a layer on a semiconductor wafer by means of CVD and chamber for carrying out the method | Georg Brenninger | 2012-10-09 |
| 6435797 | Method and device for loading a susceptor | Herbert Mittermaier, Georg Brenninger | 2002-08-20 |