Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163670 | Device and method for heat treating an object | Stefan Jost, Jörg Palm | 2018-12-25 |
| 9926626 | System and method for processing substrates | Stefan Jost, Jörg Palm | 2018-03-27 |
| 6899762 | Epitaxially coated semiconductor wafer and process for producing it | Guido Wenski, Wolfgang Siebert, Klaus Messmann, Gerhard Heier, Thomas Altmann | 2005-05-31 |
| 6217212 | Method and device for detecting an incorrect position of a semiconductor wafer | Georg Brenninger, Wolfgang SEDLMEIER, Per-Ove Hansson | 2001-04-17 |