Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835567 | Method for monitoring the operational state of a surface inspection system for detecting defects on the surface of semiconductor wafers | — | 2017-12-05 |
| 8304860 | Epitaxially coated silicon wafer and method for producing an epitaxially coated silicon wafer | Friedrich Passek, Martin Pickel, Reinhard Schauer | 2012-11-06 |