Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11148250 | Method for dressing polishing pads | Vladimir Dutschke, Torsten Olbrich, Markus Schnappauf | 2021-10-19 |
| 11075070 | Monocrystalline semiconductor wafer and method for producing a semiconductor wafer | Klaus Roettger, Herbert Becker, Andreas Muehe | 2021-07-27 |
| 10189142 | Method for polishing a semiconductor wafer | Klaus Roettger, Alexander Heilmaier, Makoto Tabata, Vladimir Dutschke, Torsten Olbrich | 2019-01-29 |
| 9221149 | Method for polishing semiconductor wafers by means of simultaneous double-side polishing | Rainer Baumann, Johannes Staudhammer, Alexander Heilmaier, Klaus Roettger | 2015-12-29 |