Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11161217 | Method for polishing a semiconductor wafer on both sides | — | 2021-11-02 |
| 11148250 | Method for dressing polishing pads | Torsten Olbrich, Leszek Mistur, Markus Schnappauf | 2021-10-19 |
| 10189142 | Method for polishing a semiconductor wafer | Klaus Roettger, Alexander Heilmaier, Leszek Mistur, Makoto Tabata, Torsten Olbrich | 2019-01-29 |