Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270054 | Method and system for calculating printed area metric indicative of stochastic variations of the lithographic process | Hyejin Jin, John L. Sturtevant, Shumay D. Shang, Azat Latypov, Germain Louis Fenger | 2022-03-08 |
| 11061373 | Method and system for calculating probability of success or failure for a lithographic process due to stochastic variations of the lithographic process | Germain Louis Fenger, Azat Latypov, John L. Sturtevant, Yuri Granik | 2021-07-13 |