Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6046487 | Shallow trench isolation with oxide-nitride/oxynitride liner | John Benedict, David M. Dobuzinsky, Philip L. Flaitz, Erwin Hammerl, Herbert L. Ho +3 more | 2000-04-04 |
| 5763315 | Shallow trench isolation with oxide-nitride/oxynitride liner | John Benedict, David M. Dobuzinsky, Philip L. Flaitz, Erwin Hammerl, Herbert L. Ho +3 more | 1998-06-09 |
| 5747866 | Application of thin crystalline Si.sub.3 N.sub.4 liners in shallow trench isolation (STI) structures | Herbert L. Ho, Erwin Hammerl, David M. Dobuzinsky, Herbert Palm, Stephen G. Fugardi +2 more | 1998-05-05 |
| 5643823 | Application of thin crystalline Si.sub.3 N.sub.4 liners in shallow trench isolation (STI) structures | Herbert L. Ho, Erwin Hammerl, David M. Dobuzinsky, J. Herbert Palm, Stephen G. Fugardi +2 more | 1997-07-01 |