Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10569291 | Film formation method and film formation apparatus for thin film | Shingo Samori, Shinichi Takase, Satoshi Sugawara, Ekishu Nagae | 2020-02-25 |
| 10415135 | Thin film formation method and thin film formation apparatus | Yohei Hinata, Kyokuyo Sai, Yoshiyuki Otaki, Ichiro Shiono | 2019-09-17 |
| 10000844 | Magnetic field generator, magnetron cathode and spattering apparatus | Wei Kong, Zijing Lin, Ming Li, Bin Xie, Haiqian WANG +1 more | 2018-06-19 |
| 9499897 | Thin film forming apparatus | Ichiro Shiono, Mitsuhiro Miyauchi, Takaaki Aoyama, Tatsuya Hayashi, Ekishu Nagae | 2016-11-22 |
| 9422620 | Translucent hard thin film | Takuya Sugawara, Hikaru Aoshima, Ichiro Shiono | 2016-08-23 |
| 9365920 | Method for depositing film | Ichiro Shiono, Ekishu Nagae, Takuya Sugawara | 2016-06-14 |
| 9315415 | Method for depositing film and oil-repellent substrate | Ichiro Shiono, Ekishu Nagae, Takuya Sugawara | 2016-04-19 |
| 9157146 | Method for depositing silicon carbide film | Takuya Sugawara, Hikaru Aoshima, Ichiro Shiono, Ekishu Nagae | 2015-10-13 |
| 8922790 | Optical film thickness measuring device and thin film forming apparatus using the optical film thickness measuring device | Kyokuyo Sai, Kenji Ozawa | 2014-12-30 |
| 8826856 | Optical thin-film vapor deposition apparatus and optical thin-film production method | Ekishu Nagae, Ichiro Shiono, Tadayuki Shimizu, Tatsuya Hayashi, Makoto Furukawa +1 more | 2014-09-09 |
| 8625111 | Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter | Kyokuyo Sai, Yohei Hinata, Yoshiyuki Otaki | 2014-01-07 |