Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10415135 | Thin film formation method and thin film formation apparatus | Yohei Hinata, Yoshiyuki Otaki, Ichiro Shiono, Yousong Jiang | 2019-09-17 |
| 8922790 | Optical film thickness measuring device and thin film forming apparatus using the optical film thickness measuring device | Yousong Jiang, Kenji Ozawa | 2014-12-30 |
| 8625111 | Optical film thickness meter and thin film forming apparatus provided with optical film thickness meter | Yohei Hinata, Yoshiyuki Otaki, Yousong Jiang | 2014-01-07 |