Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534384 | Method for manufacturing SOI wafer including heat treatment in an oxidizing atmosphere | Masatake Nakano | 2003-03-18 |
| 5918139 | Method of manufacturing a bonding substrate | Kiyoshi Mitani | 1999-06-29 |
| 5650353 | Method for production of SOI substrate | Tsutomu Sato, Kiyoshi Mitani, Masatake Katayama | 1997-07-22 |