Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10319587 | Method of manufacturing epitaxial wafer and silicon-based substrate for epitaxial growth | Kazunori HAGIMOTO, Masaru Shinomiya, Keitaro TSUCHIYA, Hirokazu Goto, Ken Sato +2 more | 2019-06-11 |
| 9938638 | Method for producing semiconductor epitaxial wafer and semiconductor epitaxial wafer | Kazunori HAGIMOTO, Masaru Shinomiya, Keitaro TSUCHIYA, Hirokazu Goto, Ken Sato +2 more | 2018-04-10 |
| 8569148 | Final polishing method for silicon single crystal wafer and silicon single crystal wafer | Naoto Iizuka, Koichi Kosaka, Fumiaki Maruyama | 2013-10-29 |