Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9163327 | Silicon wafer and a silicon epitaxial wafer having a polycrystal silicon layer formed on a major surface including boron concentration of the polycrystal silicon layer being 1×1015 atom/cm3 or less | Naoki Naito, Atsuo Uchiyama | 2015-10-20 |
| 8569148 | Final polishing method for silicon single crystal wafer and silicon single crystal wafer | Naoto Iizuka, Hirotaka Kurimoto, Koichi Kosaka | 2013-10-29 |
| 8273146 | Wafer and epitaxial wafer, and manufacturing processes therefor | Naoki Naito, Atsuo Uchiyama | 2012-09-25 |