Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8569148 | Final polishing method for silicon single crystal wafer and silicon single crystal wafer | Hirotaka Kurimoto, Koichi Kosaka, Fumiaki Maruyama | 2013-10-29 |
| 6058947 | Contamination monitoring system | Ryan Paul Bennett, Harry Frank Zaro, Jr. | 2000-05-09 |
| 5849103 | Method of monitoring fluid contamination | Ryan Paul Bennett, Harry Frank Zaro, Jr. | 1998-12-15 |