Issued Patents All Time
Showing 26–35 of 35 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6234879 | Method and apparatus for wafer chamfer polishing | Fumihiko Hasegawa, Tatsuo Ohtani | 2001-05-22 |
| 5928066 | Apparatus for polishing peripheral portion of wafer | Fumihiko Hasegawa, Toshihiro Tsuchiya, Koichiro Ichikawa, Yasuo Inada | 1999-07-27 |
| 5882539 | Wafer processing method and equipment therefor | Fumihiko Hasegawa, Masayuki Yamada | 1999-03-16 |
| 5766065 | Apparatus for polishing peripheral portion of wafer | Fumihiko Hasegawa, Koichiro Ichikawa, Yasuo Inada | 1998-06-16 |
| 5733181 | Apparatus for polishing the notch of a wafer | Fumihiko Hasegawa, Tatsuo Ohtani, Koichiro Ichikawa, Yasuo Inada | 1998-03-31 |
| 5727990 | Method for mirror-polishing chamfered portion of wafer and mirror-polishing apparatus | Fumihiko Hasegawa, Tatsuo Ohtani, Koichiro Ichikawa, Yasuo Inada | 1998-03-17 |
| 5547415 | Method and apparatus for wafer chamfer polishing | Fumihiko Hasegawa, Tatsuo Ohtani | 1996-08-20 |
| 5538463 | Apparatus for bevelling wafer-edge | Fumihiko Hasegawa, Tatsuo Ohtani | 1996-07-23 |
| 5476413 | Apparatus for polishing the periphery portion of a wafer | Fumihiko Hasegawa, Tatsuo Ohtani, Koichiro Ichikawa, Yasuo Inada | 1995-12-19 |
| 5404678 | Wafer chamfer polishing apparatus with rotary circular dividing table | Fumihiko Hasegawa, Tatsuo Ohtani | 1995-04-11 |