Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8753786 | Light pattern exposure method, halftone phase shift mask, and halftone phase shift mask blank | Hiroki Yoshikawa, Yukio Inazuki, Ryuji Koitabashi, Hideo Kaneko, Yosuke Kojima +1 more | 2014-06-17 |
| 8753787 | Light pattern exposure method, photomask, and photomask blank | Hiroki Yoshikawa, Yukio Inazuki, Ryuji Koitabashi, Hideo Kaneko, Yosuke Kojima +1 more | 2014-06-17 |
| 8475978 | Photomask blank and making method, photomask, light pattern exposure method, and design method of transition metal/silicon base material film | Hiroki Yoshikawa, Yukio Inazuki, Ryuji Koitabashi, Hideo Kaneko, Takashi Haraguchi +1 more | 2013-07-02 |