Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10656516 | Photomask blank, and preparation method thereof | Yukio Inazuki | 2020-05-19 |
| 10564537 | Photomask blank, and preparation method thereof | Yukio Inazuki | 2020-02-18 |
| 10545401 | Phase shift mask blank, phase shift mask, and blank preparing method | Yukio Inazuki | 2020-01-28 |
| 10466583 | Halftone phase shift mask blank and halftone phase shift mask | Yukio Inazuki, Kouhei Sasamoto, Hideo Kaneko | 2019-11-05 |
| 10459333 | Halftone phase shift photomask blank and making method | Yukio Inazuki, Hideo Kaneko | 2019-10-29 |
| 10372030 | Halftone phase shift mask blank and halftone phase shift mask | Kouhei Sasamoto, Yukio Inazuki, Hideo Kaneko | 2019-08-06 |
| 10146122 | Halftone phase shift photomask blank and making method | Yukio Inazuki, Hideo Kaneko | 2018-12-04 |
| 10078260 | Phase shift mask blank, phase shift mask, and blank preparing method | Yukio Inazuki | 2018-09-18 |
| 9927695 | Halftone phase shift mask blank, halftone phase shift mask, and pattern exposure method | Yukio Inazuki | 2018-03-27 |
| 9897911 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | — | 2018-02-20 |
| 9778560 | Method for preparing halftone phase shift photomask blank | — | 2017-10-03 |
| 9778559 | Method for preparing halftone phase shift photomask blank | Yukio Inazuki | 2017-10-03 |
| 9651858 | Binary photomask blank, preparation thereof, and preparation of binary photomask | Yukio Inazuki, Kazuhiro Nishikawa | 2017-05-16 |
| 9645485 | Halftone phase shift photomask blank and making method | Yukio Inazuki, Hideo Kaneko, Toyohisa Sakurada | 2017-05-09 |
| 9366951 | Halftone phase shift photomask blank, halftone phase shift photomask and pattern exposure method | Yukio Inazuki, Toyohisa Sakurada, Hideo Kaneko, Kouhei Sasamoto | 2016-06-14 |