Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8426105 | Resist-modifying composition and pattern forming process | Takeru Watanabe, Kazuhiro Katayama, Jun Hatakeyama, Tsunehiro Nishi, Takeshi Kinsho | 2013-04-23 |
| 8367310 | Pattern forming process and resist-modifying composition | Takeru Watanabe, Jun Hatakeyama, Tsunehiro Nishi, Yoshio Kawai | 2013-02-05 |
| 8329384 | Resist-modifying composition and pattern forming process | Takeru Watanabe, Kazuhiro Katayama, Jun Hatakeyama, Tsunehiro Nishi, Takeshi Kinsho | 2012-12-11 |
| 7985528 | Positive resist composition and patterning process | Tsunehiro Nishi, Takeshi Kinsho, Masaki Ohashi, Koji Hasegawa | 2011-07-26 |