Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081380 | Chip bonding device | Feibiao Chen, Hai Xia, Hailin Cheng, Xiaoyu Jiang, Lili Zhao +1 more | 2021-08-03 |
| 11037900 | Chip bonding device and bonding method thereof | Song Guo, Jianqi SUN, Feibiao Chen, Tianming Wang, Hai Xia | 2021-06-15 |
| 10770320 | Universal chip batch-bonding apparatus and method | Song Guo, Feibiao Chen, Hai Xia | 2020-09-08 |
| 10748800 | Chip bonding apparatus and method | Feibiao Chen, Hai Xia, Bin Yu, Song Guo, Yaping Ge | 2020-08-18 |
| 10691025 | Reaction force diversion mechanism, motor device and photolithography machine | Baoliang Wang, Fuqiang YANG | 2020-06-23 |
| 10353297 | Moving platform device, exposure device and lithography machine | Lili Ge | 2019-07-16 |
| 10041548 | Silicon wafer edge protection device with collision protection function | Jingli Huang | 2018-08-07 |
| 9760022 | Lithography machine workpiece table and vertical position initialization method thereof | Feihong Liao, Haili Jia, Shuping Hu | 2017-09-12 |